Triphenylsulfonium triflate

  • Product Code: 73462
  CAS:    66003-78-9
Molecular Weight: 412.45 g./mol Molecular Formula: C₁₉H₁₅F₃O₃S₂
EC Number: MDL Number:
Melting Point: 133 - 137 °C - lit. Boiling Point:
Density: Storage Condition: room temperature
Product Description: Used extensively in photolithography processes for semiconductor manufacturing, it serves as a photoacid generator (PAG) in photoresists. When exposed to ultraviolet (UV) light, it generates strong acids that catalyze the chemical changes needed to create precise patterns on silicon wafers. This is critical for producing microchips and other electronic components with high precision and miniaturization. Additionally, it finds applications in advanced materials research, particularly in the development of high-performance coatings and polymers that require controlled curing or cross-linking under light exposure. Its stability and efficiency make it a preferred choice in industries demanding high-resolution patterning and reliable performance.
Product Specification:
Test Specification
APPEARANCE White Powder
Infrared spectrum Conforms to Structure
NMR Conforms to Structure
Sizes / Availability / Pricing:
Size (g) Availability Price Quantity
0.050 10-20 days $35.71
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0.250 10-20 days $90.53
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1.000 10-20 days $152.83
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5.000 10-20 days $415.29
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25.000 10-20 days $1,353.85
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Triphenylsulfonium triflate
Used extensively in photolithography processes for semiconductor manufacturing, it serves as a photoacid generator (PAG) in photoresists. When exposed to ultraviolet (UV) light, it generates strong acids that catalyze the chemical changes needed to create precise patterns on silicon wafers. This is critical for producing microchips and other electronic components with high precision and miniaturization. Additionally, it finds applications in advanced materials research, particularly in the development of high-performance coatings and polymers that require controlled curing or cross-linking under light exposure. Its stability and efficiency make it a preferred choice in industries demanding high-resolution patterning and reliable performance.
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