10-(4-Biphenylyl)-2-isopropyl-9-oxo-9H-thioxanthenium hexafluorophosphate

95%

  • Product Code: 114971
  CAS:    591773-92-1
Molecular Weight: 552.511 g./mol Molecular Formula: C₂₈H₂₃F₆OPS
EC Number: MDL Number:
Melting Point: Boiling Point:
Density: Storage Condition: room temperature, dry
Product Description: Used primarily as a photoacid generator (PAG) in photoresist formulations for semiconductor manufacturing. It generates acid upon exposure to UV light, which helps in the patterning process during lithography. The compound is valued for its high sensitivity and efficiency in producing fine patterns on silicon wafers. Additionally, it finds application in advanced materials research for developing high-resolution imaging systems. Its stability under processing conditions makes it suitable for use in deep UV and extreme UV lithography technologies.
Product Specification:
Test Specification
Appearance Pink Brown Powder
Purity (%) 94.5-100
Infrared Spectrum Conforms To Structure
NMR Conforms To Structure
Sizes / Availability / Pricing:
Size (g) Availability Price Quantity
10.000 10-20 days ฿790.00
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-
50.000 10-20 days ฿2,880.00
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-
250.000 10-20 days ฿9,680.00
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10-(4-Biphenylyl)-2-isopropyl-9-oxo-9H-thioxanthenium hexafluorophosphate
Used primarily as a photoacid generator (PAG) in photoresist formulations for semiconductor manufacturing. It generates acid upon exposure to UV light, which helps in the patterning process during lithography. The compound is valued for its high sensitivity and efficiency in producing fine patterns on silicon wafers. Additionally, it finds application in advanced materials research for developing high-resolution imaging systems. Its stability under processing conditions makes it suitable for use in deep UV and extreme UV lithography technologies.
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