1,2,3,4,5,6-hexamethylcyclotrisilazane

technical grade

  • Product Code: 191825
  CAS:    2587-46-4
Molecular Weight: 219.508 g./mol Molecular Formula: C₆H₂₁N₃Si₃
EC Number: MDL Number: MFCD00054845
Melting Point: Boiling Point: 56 °C at 5 mmHg
Density: Storage Condition: 2-8°C
Product Description: Used as a precursor in the synthesis of silicon-based polymers and ceramics, particularly in the production of silicon carbonitride materials through pyrolysis. It serves as a key reagent in deposition processes for creating protective coatings and thin films in microelectronics due to its ability to form stable, high-purity layers at relatively low temperatures. Also employed in research for developing novel silazane-based networks with tailored thermal and mechanical properties. Its high reactivity and volatility make it suitable for vapor-phase applications in semiconductor manufacturing and advanced material fabrication.
Sizes / Availability / Pricing:
Size Availability Price Quantity
5.000 G 10-20 days ฿41,800.00
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1,2,3,4,5,6-hexamethylcyclotrisilazane
Used as a precursor in the synthesis of silicon-based polymers and ceramics, particularly in the production of silicon carbonitride materials through pyrolysis. It serves as a key reagent in deposition processes for creating protective coatings and thin films in microelectronics due to its ability to form stable, high-purity layers at relatively low temperatures. Also employed in research for developing novel silazane-based networks with tailored thermal and mechanical properties. Its high reactivity and volatility make it suitable for vapor-phase applications in semiconductor manufacturing and advanced material fabrication.
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