Hafnium dimethylamide
97%
- Product Code: 191830
CAS:
19962-11-9
Molecular Weight: | 354.793 g./mol | Molecular Formula: | C₈H₂₄HfN₄ |
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EC Number: | MDL Number: | ||
Melting Point: | 26-29 °C(lit.) | Boiling Point: | 85 °C at 0.1 mmHg |
Density: | Storage Condition: | 2-8°C |
Product Description:
Used primarily as a precursor in metal-organic chemical vapor deposition (MOCVD) for depositing hafnium-containing thin films, especially hafnium oxide (HfO₂). These films serve as high-k dielectrics in advanced semiconductor devices, including transistors and dynamic random-access memory (DRAM), enabling improved performance and reduced leakage current. The compound’s volatility and thermal stability make it suitable for precise, controlled deposition at relatively low temperatures. It is also explored in atomic layer deposition (ALD) processes for nanoscale electronic applications.
Sizes / Availability / Pricing:
Size | Availability | Price | Quantity |
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1.000 G | 10-20 days | ฿31,550.00 |
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Hafnium dimethylamide
Used primarily as a precursor in metal-organic chemical vapor deposition (MOCVD) for depositing hafnium-containing thin films, especially hafnium oxide (HfO₂). These films serve as high-k dielectrics in advanced semiconductor devices, including transistors and dynamic random-access memory (DRAM), enabling improved performance and reduced leakage current. The compound’s volatility and thermal stability make it suitable for precise, controlled deposition at relatively low temperatures. It is also explored in atomic layer deposition (ALD) processes for nanoscale electronic applications.
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