Trisilane

  • Product Code: 238524
  CAS:    7783-26-8
Molecular Weight: 92.32 g./mol Molecular Formula: H₈Si₃
EC Number: MDL Number:
Melting Point: -117.4 °C Boiling Point:
Density: Storage Condition: 2-8°C
Product Description: Used in semiconductor manufacturing as a silicon precursor for depositing silicon-containing films via chemical vapor deposition (CVD). It enables low-temperature deposition processes, making it suitable for advanced microelectronics and thin-film applications. Also explored in the synthesis of silicon-based nanomaterials and as a reagent in specialty chemical reactions requiring high reactivity.
Sizes / Availability / Pricing:
Size Availability Price Quantity
1g 10-20 days $6,396.37
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Trisilane
Used in semiconductor manufacturing as a silicon precursor for depositing silicon-containing films via chemical vapor deposition (CVD). It enables low-temperature deposition processes, making it suitable for advanced microelectronics and thin-film applications. Also explored in the synthesis of silicon-based nanomaterials and as a reagent in specialty chemical reactions requiring high reactivity.
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