Trisilane
- Product Code: 238524
CAS:
7783-26-8
Molecular Weight: | 92.32 g./mol | Molecular Formula: | H₈Si₃ |
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EC Number: | MDL Number: | ||
Melting Point: | -117.4 °C | Boiling Point: | |
Density: | Storage Condition: | 2-8°C |
Product Description:
Used in semiconductor manufacturing as a silicon precursor for depositing silicon-containing films via chemical vapor deposition (CVD). It enables low-temperature deposition processes, making it suitable for advanced microelectronics and thin-film applications. Also explored in the synthesis of silicon-based nanomaterials and as a reagent in specialty chemical reactions requiring high reactivity.
Sizes / Availability / Pricing:
Size | Availability | Price | Quantity |
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1g | 10-20 days | $6,396.37 |
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Trisilane
Used in semiconductor manufacturing as a silicon precursor for depositing silicon-containing films via chemical vapor deposition (CVD). It enables low-temperature deposition processes, making it suitable for advanced microelectronics and thin-film applications. Also explored in the synthesis of silicon-based nanomaterials and as a reagent in specialty chemical reactions requiring high reactivity.
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