Used as a reagent in organic synthesis for introducing protected carbamate and urea functionalities. It reacts selectively with alcohols to form O-(trimethylsilyl)carbamates and with amines to form N-(trimethylsilyl)ureas, which are stable under basic and neutral conditions but can be deprotected under mild acidic or hydrolytic conditions without affecting the core molecular structure. This selectivity makes it valuable in multi-step syntheses, particularly in the pharmaceutical and agrochemical industries for preparing complex intermediates.

Additionally, it is employed in the preparation of isocyanate derivatives and silylated intermediates, which are used in the production of specialty polymers and silicon-based materials. Due to its moisture sensitivity and reactivity, it must be handled under anhydrous conditions in an inert atmosphere.