Hexamethyl disilylamine (HMDS)

AR,98%

  • Product Code: 87982
  Alias:    Hexamethyldisilazane; Hexamethyldisilazane, Hexamethyldisilazane
  CAS:    999-97-3
Molecular Weight: 161.39 g./mol Molecular Formula: C₆H₁₉NSi₂
EC Number: 213-668-5 MDL Number: MFCD00008259
Melting Point: -78 °C Boiling Point: 125 °C(lit.)
Density: 0.774 g/mL at 25 °C(lit.) Storage Condition: Room temperature, cool, filled with argon
Product Description: Hexamethyl disilylamine (HMDS) is widely used in the semiconductor industry as a priming agent for photoresist adhesion. It is applied to silicon wafers to create a hydrophobic surface, which improves the uniformity and adhesion of photoresists during lithography processes. This ensures precise patterning in microchip manufacturing. HMDS is also utilized in organic synthesis as a silylating agent, protecting reactive functional groups like hydroxyl and amine during chemical reactions. Additionally, it serves as a precursor in the production of silicon-based materials, including silicon nitride and silicon carbide, which are essential in advanced ceramics and electronics. Its volatility and reactivity make it a valuable chemical in both industrial and laboratory settings.
Product Specification:
Test Specification
PURITY 98-100
REFRACTIVE INDEX 20C 1.4069-1.4089
APPEARANCE COLORLESS LIQUID
Sizes / Availability / Pricing:
Size (g) Availability Price Quantity
25.000 10-20 days ฿310.00
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100.000 10-20 days ฿590.00
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250.000 10-20 days ฿1,380.00
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500.000 10-20 days ฿2,750.00
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2500.000 10-20 days ฿9,680.00
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Hexamethyl disilylamine (HMDS)
Hexamethyl disilylamine (HMDS) is widely used in the semiconductor industry as a priming agent for photoresist adhesion. It is applied to silicon wafers to create a hydrophobic surface, which improves the uniformity and adhesion of photoresists during lithography processes. This ensures precise patterning in microchip manufacturing. HMDS is also utilized in organic synthesis as a silylating agent, protecting reactive functional groups like hydroxyl and amine during chemical reactions. Additionally, it serves as a precursor in the production of silicon-based materials, including silicon nitride and silicon carbide, which are essential in advanced ceramics and electronics. Its volatility and reactivity make it a valuable chemical in both industrial and laboratory settings.
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