Hexamethyl disilylamine (HMDS)
AR,98%
- Product Code: 87982
Alias:
Hexamethyldisilazane; Hexamethyldisilazane, Hexamethyldisilazane
CAS:
999-97-3
| Molecular Weight: | 161.39 g./mol | Molecular Formula: | C₆H₁₉NSi₂ |
|---|---|---|---|
| EC Number: | 213-668-5 | MDL Number: | MFCD00008259 |
| Melting Point: | -78 °C | Boiling Point: | 125 °C(lit.) |
| Density: | 0.774 g/mL at 25 °C(lit.) | Storage Condition: | Room temperature, cool, filled with argon |
Product Description:
Hexamethyl disilylamine (HMDS) is widely used in the semiconductor industry as a priming agent for photoresist adhesion. It is applied to silicon wafers to create a hydrophobic surface, which improves the uniformity and adhesion of photoresists during lithography processes. This ensures precise patterning in microchip manufacturing. HMDS is also utilized in organic synthesis as a silylating agent, protecting reactive functional groups like hydroxyl and amine during chemical reactions. Additionally, it serves as a precursor in the production of silicon-based materials, including silicon nitride and silicon carbide, which are essential in advanced ceramics and electronics. Its volatility and reactivity make it a valuable chemical in both industrial and laboratory settings.
Product Specification:
| Test | Specification |
|---|---|
| PURITY | 98-100 |
| REFRACTIVE INDEX 20C | 1.4069-1.4089 |
| APPEARANCE | COLORLESS LIQUID |
Sizes / Availability / Pricing:
| Size | Availability | Price | Quantity |
|---|---|---|---|
| 25ml | 10-20 days | €8.23 |
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| 100ml | 10-20 days | €15.67 |
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| 250ml | 10-20 days | €36.64 |
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| 500ml | 10-20 days | €73.02 |
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| 2.5L | 10-20 days | €257.03 |
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Hexamethyl disilylamine (HMDS)
Hexamethyl disilylamine (HMDS) is widely used in the semiconductor industry as a priming agent for photoresist adhesion. It is applied to silicon wafers to create a hydrophobic surface, which improves the uniformity and adhesion of photoresists during lithography processes. This ensures precise patterning in microchip manufacturing. HMDS is also utilized in organic synthesis as a silylating agent, protecting reactive functional groups like hydroxyl and amine during chemical reactions. Additionally, it serves as a precursor in the production of silicon-based materials, including silicon nitride and silicon carbide, which are essential in advanced ceramics and electronics. Its volatility and reactivity make it a valuable chemical in both industrial and laboratory settings.
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