Used as a precursor in the synthesis of yttrium-containing materials via sol-gel and metal-organic chemical vapor deposition (MOCVD) processes. Commonly applied in the fabrication of yttrium oxide (Y₂O₃) thin films, which serve in optical coatings, phosphors, and dielectric layers for electronic devices. Its high volatility and thermal stability make it suitable for depositing high-purity films at moderate temperatures. Also employed in the preparation of luminescent materials and doped ceramics for use in display technologies and solid-state lasers.